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reactive ion etching
finishing process
Also known as: RIE
Learn about this topic in these articles:
integrated circuits
- In integrated circuit: Etching
…with strong chemicals or by reactive ion etching (RIE). RIE is like sputtering in the argon chamber, but the polarity is reversed and different gas mixtures are used. The atoms on the surface of the wafer fly away, leaving it bare.
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