chemically amplified photoresist

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chemically amplified photoresist

materials science

Also known as: CAMP

Learn about this topic in these articles:

use in integrated circuits

In materials science: Photoresist films
…solution is to use the chemically amplified photoresist, or CAMP. The sensitivity of a photoresist is measured by its quantum efficiency, or the number of chemical events that occur when a photon is absorbed by the material. In CAMP material, the number of events is dramatically increased by subsequent chemical…
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